(주)동일과학

Specifications

Item Code	00
Model	PiPi
Model	PiPi
Plasma mode	RIE (reactive ion etching)
Electrode structure	Parallel flat panel type
Electrode dimensions	W130×D130mm
Internal dmensions	W230×D130×H100mm
External dimensions	W438×D520×H565mm
Power source (50/60Hz)	AC115V/AC220V Single phase with step-down transformer
Vacuum meter	Bourdon gauge
Controller	Sequencer
Operation/display unit	4.5-inch monochrome STN touch panel
High-frequency out-put power	50-200W
Reference oscillator	Quarts oscillator
Oscillation frequency	13.56MHz
Output setting	Manual setting knob
Matching method	Auto tuning
Purge gas	N2 1/4-inch bite type tube fitting
Reaction gas	Ar mass flow meter 1/4-inch bite type tube fitting
Internal dimensions（W×D×H mm）	230×130×100mm
External dimensions（W×D×H mm）	438×520×565mm
Power Source	115V /220V Single phase with step-down transformer
Weight	50kg